Scanning electron microscope (SEM) has optics that enable ultrahigh resolution imaging at low kV and high spatial resolution microanalysis. The through-the-lens system (TTLS) combines new objective lens and detector technologies with the an existing in-lens field emission gun. The TTLS is designed to enable imaging of a wide variety of samples, including magnetic materials. The instrument also features low vacuum operation and a large specimen exchange airlock. The low vacuum mode allows for imaging nonconductive samples at high kV and beam currents for a variety of analytical applications that include analysis with EDS, WDS, EBSD, and CL.