Oberkochen, Germany – May 11, 2004 – Carl Zeiss SMT has incorporated its electron beam technology business, formerly marketed under the LEO brand, into its corporate organization. LEO will become the new nanotechnology systems division of the company, operating under the Carl Zeiss SMT banner. LEO has been associated with the Carl Zeiss Group for more than 60 years, although it has been wholly owned only since 2001.
“With this step we are accomplishing the complete integration of electron beam technooogy into the Carl Zeiss SMT portfolio,” says Dr Dirk Stenkamp, CEO of the LEO Group. “We expect many different synergies. The innovative power of electron beam technology will receive a clear boost under the aegis of SMT and at the same time will benefit from the worldwide image provided by the Carl Zeiss brand.”
Carl Zeiss SMT produces optical systems for the manufacturing of microchips and controlling the manufacturing process. Other SMT divisions encompass laser optics for lithography lasers, as well as electron-beam based inspection systems for material analysis, biological and medical research and applications in the semiconductor sector.