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Spectroscopic ellipsometer handles high speed thin film measurement


Available in two models, spectroscopic ellipsometer is designed for the high speed measurement of film thickness and optical constants of thin films. Advanced high-speed model also handles automated 300 mm substrate measurements. The compact instrument eliminates the need for conventional methods that mechanically or electrically control polarization devices. It takes advantage of the spectrums obtained from the polarization interference occurring between two high-order phase shifters to instantaneously capture the wavelength distribution of the sample’s spectroscopic polarization parameters. The automated model combines ultra-fast measuring capabilities with an automated mapping function that can handle 300 mm substrates. It can be used in a wide range of applications in research and development.

ULVAC Technologies

 


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