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Plasma cleaner gets automated


Equipped with PLC control, the PE-25-jw automated plasma cleaner comes with a single gas channel, and can be equipped with an optional second. Fully automated and easy to operate the system has automatic process sequencing capabilities. All timed events (pumpdown, plasma, gas stabilization and vent) can be programmed into the automatic sequence with the PLC keypad that is used for operator entry and one complete process recipe can be store in memory for repeatable results. The unit has a 125W 50KHz RF power supply with continuously variable power capability. The unit has a 2.5” x 4” Horizontal “Direct Contact” RF powered electrode with 1.25” of chamber height clearance.

Plasma Etch


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